10.1016\/j.vacuum.2020.109653<\/a>.<\/p>\nAbstract:<\/strong>
\nA new design of carbon source using a S-shaped glassy carbon filament for p-doping and carbon deposition is presented. Due to the higher resistivity of the glassy carbon, lower current is needed to produce the same flux as in a source based on pyrolytic graphite filament. The source design is very compact and the use of water cooling is not mandatory. The results and simulations of the new design show a higher flux than the previously reported glassy carbon based source while avoiding hot spots that can cause an early filament degradation. Hole mobility vs doping level relation data on p-doped GaAs layers grown by molecular beam epitaxy using this new carbon source are shown. With this new C source GaAs (001) surface morphology flatness is preserved after depositing C, showing a reduced substrate heating radiation essential for operate in III-V solid source molecular beam epitaxy (MBE) systems..<\/p>\n","protected":false},"excerpt":{"rendered":"Authors: Fuster, D; Gonzalez, Y; Gonzalez, L; Mendez, J; Garcia, F; Cordoba-Cabanillas, JL; Dotor, ML; Alvaro, R; Torne, L; Garcia,…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[190],"tags":[196,205,198],"class_list":{"0":"post-4946","1":"post","2":"type-post","3":"status-publish","4":"format-standard","6":"category-publications-2020","7":"tag-applied-en","8":"tag-materials-science-en","9":"tag-multidisciplinary-physics-en"},"menu_order":0,"_links":{"self":[{"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/posts\/4946","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/comments?post=4946"}],"version-history":[{"count":0,"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/posts\/4946\/revisions"}],"wp:attachment":[{"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/media?parent=4946"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/categories?post=4946"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/imn.csic.es\/en\/wp-json\/wp\/v2\/tags?post=4946"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}